Coxem tabletop SEM & Kleindiek rotation-tilt-stage
Tisch-REM COXEM
06.02.2025
Coxem tabletop SEM & Kleindiek rotation-tilt-stage
Customised solution for specific customer requirements
When it comes to analysing uneven samples, precision from any direction is crucial.
One of our customer had a clear challenge: he wanted to analyse uneven samples from all directions - but the limited space in the laboratory only allowed the use of a compact Coxem tabletop SEM. However, the standard tabletop SEM does not offer a rotation-tilt stage, which was crucial for the desired analysis.
So together with our partner Kleindiek, we at Gloor Instruments developed a customised solution that was precisely tailored to our customer's requirements. Within just three months, Kleindiek customised its existing product, the Rotation Tilt RT, and made it available specifically for this application.
The result: a custom-fit solution that allows even complex samples to be analysed from all angles - and with minimal space requirements. Having successfully implemented an individual customer requirement, through innovative strength and customised technologies, we are now able to offer an enhanced technology as standardized solution.
Enhancing the Coxem table-top SEM with a two axis (rotation, tilt) sample stage, which can be mounted in the microscope with the help of a dovetail fitting. The rotation-tilt stage allows observing a sample structure from all sides with all SEM detectors (SE, BSE and EDX).
Technical specifications
- Eucentric tilt ±90°
- Rotation 360°
- user-adjustable speed
- motorised and software controlled
Dynamic focus
The dynamic focus of the Coxem SEM allows to correct for the tilt of the sample: One obtains a SEM image which is sharp in the whole region of interest and the geometric distortions due to the inclined viewing angle are corrected (see below).
