Ultim Extreme Infinity

Ultim Extreme Infinity

The Ultim Extreme Infinity EDS detector from Oxford Instruments has been specially developed for high-resolution chemical element analysis of nanomaterials and surfaces in a field-emission scanning electron microscope (FE-SEM). The system enables energy-dispersive X-ray spectroscopy (EDS/EDX) at very low accelerating voltages and short working distances. This allows the finest material structures, interfaces and chemical compositions to be examined under high-resolution microscopy conditions.

Thanks to its windowless detector design and optimised detector geometry, the Ultim Extreme Infinity achieves particularly high sensitivity for low-energy X-rays and light elements. Measurements at acceleration voltages of 1 to 3 kV enable spatially high-resolution elemental analysis down to the sub-10 nm range. The guaranteed energy resolution of no more than 46 eV at C Kα facilitates the reliable differentiation of closely spaced elemental peaks.

In combination with Tru-Q IQ signal processing and TruMap technology, the Ultim Extreme Infinity enables the precise identification of chemical elements and the generation of high-resolution EDS element maps. The high sensitivity also facilitates the analysis of radiation-sensitive materials at low electron beam currents. This makes the system particularly suitable for applications in semiconductor research, nanotechnology, surface analysis and materials science.

• Windowless EDS/EDX detector for high-resolution elemental analysis in FE-SEM
• Elemental analysis at low acceleration voltages of 1 to 3 kV
• Spatial elemental characterisation at sub-10 nm resolution under suitable measurement conditions
• Guaranteed energy resolution of ≤ 46 eV for C Kα at 50,000 cps
• High sensitivity for light elements from beryllium to fluorine
• Optimised detector geometry for short working distances of less than 5 mm
• Precise spectrum evaluation and EDS mapping with Tru-Q IQ and TruMap